Characterisation of nanodimensional structures using spectroscopic ellipsometry

Characterization of Nanocrystals Using Spectroscopic Ellipsometry

First applications of ellipsometry to the measurement of polyand nanocrystalline thin films date back to many decades. The most significant step towards the ellipsometric investigation of composite thin films was the realization of the first spectroscopic ellipsometers in the ’70s [3, 4, 8], which allowed the measurement of the dielectric function, the imaginary part of which is directly relate...

Spectroscopic ellipsometry of homoepitaxial diamond multilayers and delta-doped structures

Investigation of SiC/Oxide Interface Structures by Spectroscopic Ellipsometry

We have investigated SiC/oxide interface structures by the use of spectroscopic ellipsometry. The depth profile of the optical constants of thermally grown oxide layers on SiC was obtained by observing the slope-shaped oxide layers, and the results suggest the existence of the interface layers, around 1 nm in thickness, having high refractive index than those of both SiC and SiO2. The wavelengt...

Spectroscopic ellipsometry study

The dielectric functions of InP, IIla.53 Gao.47 As, and 1110.75 Gao.2S Aso.s P 0.5 epitaxial layers have been measured using a polarization-modulation spectroscopic ellipsometer in the 1.5 to 5.3 eV region. The oxide removal procedure has been carefully checked by comparing spectroscopic ellipsometry and x-ray photoelectron spectroscopy measurements. These reference data have been used to inves...

General approach to the analysis of plasmonic structures using spectroscopic ellipsometry

R. Verre,1,2,* M. Modreanu,3 O. Ualibek,1 D. Fox,1 K. Fleischer,4 C. Smith,1 H. Zhang,1 M. Pemble,3 J. F. McGilp,4 and I. V. Shvets1,4 1Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN) and School of Physics, Trinity College Dublin, Dublin 2, Ireland 2Department of Applied Physics, Chalmers University of Technology, 412 96 Göteborg, Sweden 3Tyndall National Institute, Unive...